XGEM Equipment

Driver Features

  1. With the features of .Net framework. The program is very flexible.
  2. Easy-to-use interface. Easy to learn and understand quickly.
  3. Meet the GEM and 300mm communication specifications of major wafer manufacturer in Taiwan.
  4. GEM Driver is divided into 14 major modules. Exactly the same as SECS/GEM Implemented Table.
  5. Both Host and Equipment are divided into 14 major modules. Easier to select the Stream Function from modules.
  6. The communication is very compatible. Highly compatible with the command format sent by Host.
  7. Each command from Host can be reply automatically or manually.
  8. The way to choose agree or reject the received Stream Function is quite simple. No need to consider encoding and decoding.
  9. All SV, DV, EC, Alarm, Report, Event, Recipe Body files are combined into a single file (MS Excel). Easy to manage.
  10. With built-in Log string for SECS transmission, users don't need to decode anymore.

Compatibility

GEM Compliance Statement
Fundamental GEM Requirements
Support
Equipment Processing States
Host Initiated S1=F13/F14 Scenario
Event Notification
On-Line Identification
Error Messages
Control (Operator Initiated)
Establish Communication Additional Capabilities
Dynamic Event Report Configuration
Variable Data Collection
Trace Data Collection
GEM Compliance Statement
Fundamental GEM Requirements
Support
Status Data Collection
Alarm Management
Remote Control
Equipment Constants
Process Program Management
Equipment Terminal Services Material Movement
Clock
Limits Monitoring
Spooling
Control (Host-Initiated)

Stream Functions

Stream Function Name
SXF0 Abort Transaction
S1F1 Are You There Request
S1F2 On Line Data
S1F3 Establish Communications Request
S1F4 Establish Communications Request Acknowledge
S1F11 Status Variable Namelist Request
S1F12 Status Variable Namelist Reply
S1F13 Establish Communications Request
S1F14 Establish Communications Request Acknowledge
S1F15 Request OFF-LINE
S1F16 OFF-LINE Acknowledge
S1F17 Request ON-LINE
S1F18 ON-LINE Acknowledge
S2F13 Equipment Constant Request
S2F14 Equipment Constant Data
S2F15 New Equipment Constant Send
S2F16 New Equipment Constant Acknowledge
S2F17 Date And Time Data
S2F18 Date And Time Data Acknowledge
S2F23 Host Initiated Trace Send
S2F24 Trace Initiated Acknowledge.
S2F29 EC Name List Request
S2F30 EC Name List Request Acknowledge
S2F31 Date And Time Set Request
S2F32 Date And Time Set Acknowledge
S2F33 Define Report
S2F34 Define Report Acknowledge
S2F35 Link Event Report
S2F36 Link Event Report Acknowledge
S2F37 Enable/Disable Event Report
S2F38 Enable/Disable Event Report Acknowledge
S2F41 Host Command Send
S2F42 Host Command Acknowledge
S2F43 Reset Spooling Streams and Functions
S2F44 Reset Spooling acknowledge
Stream Function Name
S5F1 Alarm Report Send
S5F2 Alarm Report Acknowledge
S5F3 Enable/disable Alarm Send
S5F4 Enable/disable Alarm Acknowledge
S5F5 List Alarms Request
S5F6 List Alarm Data
S5F7 List Enable Alarm Request
S5F8 List Enable Alarm Request Acknowledge
S6F1 Trace Data Send
S6F2 Trace Data Acknowledge
S6F11 Event Report Send
S6F12 Event Report Acknowledge
S6F15 Event Report Request
S6F16 Event Report Data
S6F19 Individual Report Request
S6F20 Individual Report Data
S6F23 Request Spooled Data
S6F24 Request Spooled Data Acknowledge Send
S7F1 Process Program Load Inquire
S7F2 Process Program Load Grant
S7F3 Process Program Send
S7F4 Process Program Acknowledge
S7F5 Process Program Reques
S7F6 Process Program Data
S7F17 Delete Process Program Send
S7F18 Delete Process Program Acknowledge
S7F19 Current EPPD Request
S7F20 Current EPPD Data
S7F23 Formatted Process Program Send
S7F24 Formatted Process Program Data
S7F25 Formatted Process Program Request
S7F26 Formatted Process Program Data
S10F1 Terminal Request
S10F2 Terminal Request Acknowledge
S10F3 Terminal Display, Single
S10F4 Terminal Display, Single Acknowledge
S10F5 Terminal Display, Single
S10F6 Terminal Display, Single Acknowledge